Therm-x

Pedestal Heaters

Pedestal Heaters

Therm-x manufactures brazed heater plates for the semiconductor industry. Use of multiple Mineral insulated heating elements allows for better uniformity and multi-zoning for applications where uniformity can't be met with traditional single zone tubular heaters.

Vacuum Brazed Heater Pedestal for the Semiconductor industry

• Single or Multi Zone
• Embedded Sensors
• 550°C Operating temperature
• Sapphire or ceramic lift pins
• Aluminum
• Stainless Steel
• Ceramic
• Copper
• Pyralloy (TPG) option for high uniformity
• Thermal Imaging
• Performance test
• High Isolation Resistance

Therm-x Manufactures the Following Semiconductor Products

• Cast in Heaters for Semiconductor Processing
• Custom Wafer Process Heaters & Heating Elements
• Semiconductor Heaters
• Semiconductor Wafer Vacuum Heaters
• Wafer & Gas Line Heaters
• Wafer Handling Solutions
• Water Heaters & Semiconductor Chamber Pedestal Heaters
• Wafer Processing Heaters

Custom Heaters Types and Solutions

• HEATER PLATE STANDARD OPTION 1: SIZE
• STANDARD OPTION 2: HEATING ELEMENT AND SENSING ELEMENT
• STANDARD OPTION 3: MATERIAL SELECTION
• STANDARD OPTION 4: TERMINATION
• SPECIAL OPTIONS
• INQUIRY PART NUMBER
• THERM-X EXTENDED CAPABILITY FOR HEATER
• VACUUM TEST CHAMBER