MICROELECTRONICS & FIBER OPTIC
Our inspection and testing services assure that high purity gas cabinets, panels, filter skids, gas sticks, components, tool systems, laterals, or mains are fabricated and installed in accordance with project specifications and tested to the required performance criteria for leak rate, particle, and impurity concentration.
TESTING
INBOARD HELIUM LEAK TESTING / MASS SPECTROMETER LEAK TESTING (MSLT)
We specialize in MSLT inboard leak testing on high purity gas systems, stainless steel carrier chemical systems, delivery equipment, filter skids, and HI-VAC systems to ensure the helium leak rate meets or exceeds the engineering design. Inboard (system under vacuum) leak test services may be provided for leak rates from -12 to -5 mbar l/s He range.
OUTBOARD HELIUM LEAK TESTING / MASS SPECTROMETER LEAK TESTING (MSLT)
We perform outboard leak testing / MSLT on operational facility helium systems to locate leaks in systems, transfer lines, tools, and equipment to eliminate atmospheric contamination, reduce helium loss, and save facility operating capital. Outboard (system pressurized with helium) leak testing should be carefully considered with regards to sensitivity and feasibility for new system certification even when referenced by ASME B31.3 Chapter X
